Implantation and activation of high concentrations of boron and phosphorus in Germanium

Yong Seok Suh, M. S. Carroll, Roland Levy, G. Bisognin, D. De Salvador, M. A. Sahiner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy