Implantation and activation of high concentrations of boron and phosphorus in Germanium
- Yong Seok Suh
- , M. S. Carroll
- , R. A. Levy
- , G. Bisognin
- , D. De Salvador
- , M. A. Sahiner
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Link opens in a new tab
Scopus
citations