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Impurity effects in a-Si:H solar cells due to air, oxygen, nitrogen, phosphine, or monochlorosilane in the plasma
A. E. Delahoy, R. W. Griffith
Physics
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peer-review
30
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Physics & Astronomy
phosphines
100%
solar cells
53%
nitrogen
53%
impurities
48%
oxygen
43%
air
43%
space charge
15%
products
11%
performance
8%