In-situ growth of Y1Ba2Cu3O7-x films by molecular beam epitaxy with an activated oxygen source

J. Kwo, M. Hong, D. J. Trevor, R. M. Fleming, A. E. White, J. P. Mannaerts, R. C. Farrow, A. R. Kortan, K. T. Short

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


Epitaxial, (001) oriented Y1Ba2Cu3O7-x thin films were grown on MgO(100) by molecular beam epitaxy at 650°C. The activated oxygen species were produced by a remote microwave-excited discharge in a flow tube. Remarkable improvements of superconducting properties were demonstrated due to enhancements of the flow speed of O2 stream. The as-prepared films 500Å thick show reproducibly R=0 transitions at 89K, and a ρ{variant}(100K) of 70 μΩ-cm. Ultrathin films 90Å thick still exhibit metallic-like resistivity, and a Tc(R=0) of 70K.

Original languageEnglish (US)
Pages (from-to)623-624
Number of pages2
JournalPhysica C: Superconductivity and its applications
Issue numberPART 1
StatePublished - Dec 1989

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


Dive into the research topics of 'In-situ growth of Y<sub>1</sub>Ba<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> films by molecular beam epitaxy with an activated oxygen source'. Together they form a unique fingerprint.

Cite this