@inbook{d98a2ddea7b54685b78d1730d081426a,
title = "Instrumentation",
abstract = "In this chapter we provide a brief overview of the instrumentation used for three key optical characterization methods: spectroscopic ellipsometry, Raman spectroscopy, and photoluminescence. We also discuss the relationship between the optical properties determined by each method and the data obtained by the measurement equipment.",
author = "Alain Diebold and Tino Hofmann",
note = "Publisher Copyright: {\textcopyright} 2021, Springer Nature Switzerland AG.",
year = "2021",
doi = "10.1007/978-3-030-80323-0\_3",
language = "English (US)",
series = "Springer Series in Materials Science",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "105--113",
booktitle = "Springer Series in Materials Science",
address = "Germany",
}