TY - GEN
T1 - Introduction of embossed diaphragm in an integrated optical and electronic sensor
AU - Padron, Ivan
AU - Fiory, Anthony T.
AU - Ravindra, Nuggehalli M.
PY - 2010/11/15
Y1 - 2010/11/15
N2 - An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.
AB - An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.
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M3 - Conference contribution
AN - SCOPUS:78149337882
SN - 9780470927168
T3 - Ceramic Transactions
SP - 195
EP - 204
BT - Advances in Electroceramic Materials II
T2 - Advances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09
Y2 - 25 October 2009 through 29 October 2009
ER -