Introduction of embossed diaphragm in an integrated optical and electronic sensor

An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.