Introduction of embossed diaphragm in an integrated optical and electronic sensor

Ivan Padron, Anthony T. Fiory, Nuggehalli M. Ravindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.

Original languageEnglish (US)
Title of host publicationAdvances in Electroceramic Materials II
PublisherAmerican Ceramic Society
Number of pages10
ISBN (Print)9780470927168
StatePublished - 2010

Publication series

NameCeramic Transactions
ISSN (Print)1042-1122

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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