Introduction of embossed diaphragm in an integrated optical and electronic sensor

Ivan Padron, Anthony T. Fiory, Nuggehalli M. Ravindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

An embossed silicon diaphragm is introduced in the design and fabrication of an integrated two-sensor device. In this integrated approach, the optical pressure sensor is based on Fabry-Perot interferometry and the electronic pressure sensor is based on piezoresistivity. Deformation of the same diaphragm due to external applied pressure can be simultaneously detected optically and electronically. Analytical and experimental analyses are used to study the precision and accuracy of devices for sensing pressures in fluidic and gaseous media.

Original languageEnglish (US)
Title of host publicationAdvances in Electroceramic Materials II
Pages195-204
Number of pages10
StatePublished - Nov 15 2010
EventAdvances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09 - Pittsburgh, PA, United States
Duration: Oct 25 2009Oct 29 2009

Publication series

NameCeramic Transactions
Volume221
ISSN (Print)1042-1122

Other

OtherAdvances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09
CountryUnited States
CityPittsburgh, PA
Period10/25/0910/29/09

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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