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Investigation of CF3I as an environmentally benign dielectric etchant
R. A. Levy, V. B. Zaitsev, K. Aryusook, C. Ravindranath, V. Sigal, A. Misra, S. Kesari, D. Rufin, J. Sees, L. Hall
Research output: Contribution to journal › Article › peer-review
14
Scopus
citations