Ion cluster beam deposition of thin films

W. L. Brown, M. F. Jarrold, R. L. McEachern, Marek Sosnowski, G. Takaoka, H. Usui, I. Yamada

Research output: Contribution to journalArticlepeer-review

61 Scopus citations

Fingerprint

Dive into the research topics of 'Ion cluster beam deposition of thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy