Ionization and mass spectrometry of decaborane for shallow implantation of boron into silicon

Marek Sosnowski, M. A. Albano, V. Babaram, R. Gurudath, J. M. Poate, Dale Jacobson

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint Dive into the research topics of 'Ionization and mass spectrometry of decaborane for shallow implantation of boron into silicon'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science