Issues in emissivity of silicon

S. Abedrabbo; J. C. Hensel; O. H. Gokce; F. M. Tong; B. Sopori; A. T. Fiory; N. M. Ravindra

doi:10.1557/proc-525-95

Issues in emissivity of silicon

S. Abedrabbo, J. C. Hensel, O. H. Gokce, F. M. Tong, B. Sopori, A. T. Fiory, N. M. Ravindra

Physics

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

Original language	English (US)
Pages (from-to)	95-102
Number of pages	8
Journal	Materials Research Society Symposium - Proceedings
Volume	525
DOIs	https://doi.org/10.1557/proc-525-95
State	Published - 1998
Event	Proceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA Duration: Apr 13 1998 → Apr 15 1998

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1557/proc-525-95

Cite this

@article{ec5bc022d3864cba87cc49eac95eda19,

title = "Issues in emissivity of silicon",

abstract = "The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.",

author = "S. Abedrabbo and Hensel, {J. C.} and Gokce, {O. H.} and Tong, {F. M.} and B. Sopori and Fiory, {A. T.} and Ravindra, {N. M.}",

year = "1998",

doi = "10.1557/proc-525-95",

language = "English (US)",

volume = "525",

pages = "95--102",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1998 MRS Spring Symposium ; Conference date: 13-04-1998 Through 15-04-1998",

}

TY - JOUR

T1 - Issues in emissivity of silicon

AU - Abedrabbo, S.

AU - Hensel, J. C.

AU - Gokce, O. H.

AU - Tong, F. M.

AU - Sopori, B.

AU - Fiory, A. T.

AU - Ravindra, N. M.

PY - 1998

Y1 - 1998

N2 - The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

AB - The first qualitative results of the effects of backside surface roughness on the radiative properties of silicon as a function of temperature in the wavelength range of 1-20 μm are presented in this study. These measurements have been made utilizing a spectral emissometer operating at near- and mid-IR spectral range. Surface roughness of the silicon wafer has been observed to lead to increased emissivities.

UR - http://www.scopus.com/inward/record.url?scp=0031621068&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031621068&partnerID=8YFLogxK

U2 - 10.1557/proc-525-95

DO - 10.1557/proc-525-95

M3 - Conference article

AN - SCOPUS:0031621068

SN - 0272-9172

VL - 525

SP - 95

EP - 102

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1998 MRS Spring Symposium

Y2 - 13 April 1998 through 15 April 1998

ER -

Issues in emissivity of silicon

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this