Lamellar crystallization of silicon for 3-dimensional integration

Engineering & Materials Science

• Amorphous silicon 41%
• Crystalline materials 64%
• Crystallization 100%
• Heating 21%
• Hot Temperature 14%
• Laser pulses 39%
• Melting 29%
• Semiconductor devices 35%
• Semiconductor materials 27%
• Silicon 72%
• Single crystals 35%
• Substrates 21%

Physics & Astronomy

• amorphous silicon 28%
• budgets 33%
• crystallization 70%
• heating 19%
• lamella 99%
• lasers 13%
• melting 23%
• pulses 15%
• semiconductor devices 31%
• silicon 49%
• simulation 11%
• single crystals 19%

Chemical Compounds

• Amorphous Material 31%
• Amorphous Silicon 62%
• Crystallization 64%
• Melting 39%
• Semiconductor 70%
• Simulation 29%
• Single Crystalline Solid 32%