Large-scale deposition of transparent conducting oxides by hollow cathode sputtering

Alan Delahoy, Kai Jansen, Chris Robinson, Anthony Varvar, Paul Fabiano, Rajesh Kappera, Sheyu Guo, Hongmei Li, Shaohua Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy