Laser-induced etched grating on InP for integrated optical circuit elements

Haim Grebel; P. Pien

Laser-induced etched grating on InP for integrated optical circuit elements

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	Ka-Kha Wong
Publisher	Publ by Int Soc for Optical Engineering
Pages	331-337
Number of pages	7
ISBN (Print)	0819407143
State	Published - Dec 1 1991
Event	Integrated Optical Circuits - Boston, MA, USA Duration: Sep 3 1991 → Sep 4 1991

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1583
ISSN (Print)	0277-786X

Other

Other	Integrated Optical Circuits
City	Boston, MA, USA
Period	9/3/91 → 9/4/91

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

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title = "Laser-induced etched grating on InP for integrated optical circuit elements",

abstract = "Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.",

author = "Haim Grebel and P. Pien",

year = "1991",

month = dec,

day = "1",

language = "English (US)",

isbn = "0819407143",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "Publ by Int Soc for Optical Engineering",

pages = "331--337",

editor = "Ka-Kha Wong",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

note = "Integrated Optical Circuits ; Conference date: 03-09-1991 Through 04-09-1991",

}

Grebel, H & Pien, P 1991, Laser-induced etched grating on InP for integrated optical circuit elements. in K-K Wong (ed.), Proceedings of SPIE - The International Society for Optical Engineering. Proceedings of SPIE - The International Society for Optical Engineering, vol. 1583, Publ by Int Soc for Optical Engineering, pp. 331-337, Integrated Optical Circuits, Boston, MA, USA, 9/3/91.

Laser-induced etched grating on InP for integrated optical circuit elements. / Grebel, Haim; Pien, P.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Ka-Kha Wong. Publ by Int Soc for Optical Engineering, 1991. p. 331-337 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 1583).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Laser-induced etched grating on InP for integrated optical circuit elements

AU - Grebel, Haim

AU - Pien, P.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

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M3 - Conference contribution

AN - SCOPUS:0026404949

SN - 0819407143

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 331

EP - 337

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Wong, Ka-Kha

PB - Publ by Int Soc for Optical Engineering

T2 - Integrated Optical Circuits

Y2 - 3 September 1991 through 4 September 1991

ER -

Laser-induced etched grating on InP for integrated optical circuit elements

Abstract

Publication series

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All Science Journal Classification (ASJC) codes

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