Laser-induced etched grating on InP for integrated optical circuit elements

Haim Grebel, P. Pien

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsKa-Kha Wong
PublisherPubl by Int Soc for Optical Engineering
Pages331-337
Number of pages7
ISBN (Print)0819407143
StatePublished - Dec 1 1991
EventIntegrated Optical Circuits - Boston, MA, USA
Duration: Sep 3 1991Sep 4 1991

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume1583
ISSN (Print)0277-786X

Other

OtherIntegrated Optical Circuits
CityBoston, MA, USA
Period9/3/919/4/91

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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