@inproceedings{01b66d2b9c62438f8953ffd7e996ae71,
title = "Laser-induced etched grating on InP for integrated optical circuit elements",
abstract = "Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.",
author = "Haim Grebel and P. Pien",
year = "1991",
doi = "10.1117/12.50910",
language = "English (US)",
isbn = "0819407143",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Publ by Int Soc for Optical Engineering",
pages = "331--337",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Integrated Optical Circuits ; Conference date: 03-09-1991 Through 04-09-1991",
}