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Laser-induced etching of Si surfaces: The effect of weak background light
H. Grebel
, T. Gayen, H. W. Wu
Electrical and Computer Engineering
Electronic Imaging Center
Research output
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Article
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peer-review
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Scopus citations
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Dive into the research topics of 'Laser-induced etching of Si surfaces: The effect of weak background light'. Together they form a unique fingerprint.
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Keyphrases
Si Surface
100%
Laser Assisted Etching
100%
Background Light
100%
Cell Configuration
33%
KrF Excimer Laser
33%
He-Ne Laser
33%
Etching Process
33%
UV Laser
33%
Laser Pulse
33%
Thin Cell Layer
33%
Etchant Concentration
33%
Laser Etching
33%
Etch Pattern
33%
Physics
Thin Films
100%
Laser Pulse
100%
Excimer Laser
100%
Ultraviolet Laser
100%