Low Pressure Chemical Vapor Deposition of Silicon Carbide from Ditertiarybutylsilane

J. M. Grow, R. A. Levy, M. Bhaskaran, H. J. Boeglin, R. Shalvoy

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Fingerprint

Dive into the research topics of 'Low Pressure Chemical Vapor Deposition of Silicon Carbide from Ditertiarybutylsilane'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Chemical Engineering