Low thermal budget processing for sequential 3-D IC fabrication

  • Bipin Rajendran
  • , Rohit S. Shenoy
  • , Daniel J. Witte
  • , Nehal S. Chokshi
  • , Robert L. DeLeon
  • , Gary S. Tompa
  • , R. Fabian W. Pease

Research output: Contribution to journal › Article › peer-review

67 Scopus citations

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Material Science