Keyphrases
Light-emitting
100%
Porous Silicon
100%
Submicron
100%
Silicon Area
100%
Crystalline Silicon
33%
Optical Beams
11%
Microelectronics
11%
Microscopy
11%
Room Temperature
11%
High Density
11%
Ion Implantation
11%
Electron Beam
11%
Electron Beam Lithography
11%
Nanometer Scale
11%
Submicron-sized
11%
Mapping Method
11%
Photoluminescence
11%
Silicon LED
11%
Silicon Amorphization
11%
Violet
11%
Silicon Nitride
11%
Ion Milling
11%
Reactive Ion Etching
11%
Photoluminescence Efficiency
11%
Trilayer Process
11%
Silicon Dots
11%
High Photoluminescence
11%
Silicon Wire
11%
Pore nucleation
11%
Atomic Force
11%
Group Formation
11%
Material Science
Porous Silicon
100%
Silicon
33%
Crystalline Material
33%
Photoluminescence
22%
Nucleation
11%
Density
11%
Lithography
11%
Reactive Ion Etching
11%
Ion Implantation
11%
Silicon Nitride
11%
Amorphization
11%