Measurement of lateral dopant diffusion in rapid thermal annealed W-polycide gate structures
- T. Schiml
- , J. Bevk
- , M. Furtsch
- , G. E. Georgiou
- , R. Cirelli
- , W. M. Mansfield
- , P. J. Silverman
- , H. S. Luftman
Research output: Contribution to journal › Conference article › peer-review