Measurements of electron channeling pattern linewidths in silicon

Keyphrases

• Beam Divergence 16%
• Boxcar 16%
• Crystalline Perfection 16%
• Electron Channeling Pattern 100%
• Gating Logic 16%
• High Order Reflections 16%
• High-order 16%
• Incident Beam 16%
• Intensity Pattern 16%
• Line Mode 16%
• Pattern Contrast 16%
• Quantitative Measurement 16%
• Reciprocal Lattice Vectors 16%
• Two-beam Theory 16%
• Very High-order 16%

Engineering

• Beam Divergence 16%
• Channelling 100%
• Incident Beam 16%
• Integrating Circuits 16%
• Lattice Vector 16%
• Quantitative Measurement 16%
• Reciprocal Lattice 16%
• Scan Signal 16%

Physics

• Linewidth 100%
• Scanning Electron Microscopy 50%