MEMS Fabry-Perot Fiber Optic Microphone

Ken Chin (Inventor), Guan-Hua Feng (Inventor), Harry Roman (Inventor), Yan Sun (Inventor)

Research output: InnovationPatent

Abstract

https://www.google.com/patents/US7561277

Original languageEnglish (US)
StatePublished - Jul 2018

Keywords

  • Patent Issued

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