Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy; Sebastian Falk; Payai Patra; Roman Korotkov; Bastian Siepchen; Shou Peng; Ken K. Chin

doi:10.1109/PVSC.2016.7749855

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy, Sebastian Falk, Payai Patra, Roman Korotkov, Bastian Siepchen, Shou Peng, Ken K. Chin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), Zn_xSn_yO, Cd_xSn_yO, and Cu_2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm²/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

Original language	English (US)
Title of host publication	2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1443-1448
Number of pages	6
ISBN (Electronic)	9781509027248
DOIs	https://doi.org/10.1109/PVSC.2016.7749855
State	Published - Nov 18 2016
Event	43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States Duration: Jun 5 2016 → Jun 10 2016

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
Volume	2016-November
ISSN (Print)	0160-8371

Other

Other	43rd IEEE Photovoltaic Specialists Conference, PVSC 2016
Country/Territory	United States
City	Portland
Period	6/5/16 → 6/10/16

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/PVSC.2016.7749855

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Delahoy, A. E., Falk, S., Patra, P., Korotkov, R., Siepchen, B., Peng, S., & Chin, K. K. (2016). Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. In 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016 (pp. 1443-1448). Article 7749855 (Conference Record of the IEEE Photovoltaic Specialists Conference; Vol. 2016-November). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2016.7749855

Delahoy, Alan E. ; Falk, Sebastian ; Patra, Payai et al. / Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 1443-1448 (Conference Record of the IEEE Photovoltaic Specialists Conference).

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abstract = "An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.",

author = "Delahoy, {Alan E.} and Sebastian Falk and Payai Patra and Roman Korotkov and Bastian Siepchen and Shou Peng and Chin, {Ken K.}",

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Delahoy, AE, Falk, S, Patra, P, Korotkov, R, Siepchen, B, Peng, S & Chin, KK 2016, Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. in 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016., 7749855, Conference Record of the IEEE Photovoltaic Specialists Conference, vol. 2016-November, Institute of Electrical and Electronics Engineers Inc., pp. 1443-1448, 43rd IEEE Photovoltaic Specialists Conference, PVSC 2016, Portland, United States, 6/5/16. https://doi.org/10.1109/PVSC.2016.7749855

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. / Delahoy, Alan E.; Falk, Sebastian; Patra, Payai et al.
2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 1443-1448 7749855 (Conference Record of the IEEE Photovoltaic Specialists Conference; Vol. 2016-November).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

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Delahoy AE, Falk S, Patra P, Korotkov R, Siepchen B, Peng S et al. Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. In 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 1443-1448. 7749855. (Conference Record of the IEEE Photovoltaic Specialists Conference). doi: 10.1109/PVSC.2016.7749855

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

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