Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy, Sebastian Falk, Payai Patra, Roman Korotkov, Bastian Siepchen, Shou Peng, Ken K. Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

Original languageEnglish (US)
Title of host publication2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1443-1448
Number of pages6
ISBN (Electronic)9781509027248
DOIs
StatePublished - Nov 18 2016
Event43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States
Duration: Jun 5 2016Jun 10 2016

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
Volume2016-November
ISSN (Print)0160-8371

Other

Other43rd IEEE Photovoltaic Specialists Conference, PVSC 2016
CountryUnited States
CityPortland
Period6/5/166/10/16

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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