Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy, Sebastian Falk, Payai Patra, Roman Korotkov, Bastian Siepchen, Shou Peng, Ken K. Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), Zn x Sn y O, Cd x Sn y O, and Cu 2-x O. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm 2 /Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu 2-x O layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

Original languageEnglish (US)
Title of host publication2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-6
Number of pages6
ISBN (Electronic)9781509056057
DOIs
StatePublished - 2017
Event44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States
Duration: Jun 25 2017Jun 30 2017

Publication series

Name2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017

Other

Other44th IEEE Photovoltaic Specialist Conference, PVSC 2017
CountryUnited States
CityWashington
Period6/25/176/30/17

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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