Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy; Sebastian Falk; Payai Patra; Roman Korotkov; Bastian Siepchen; Shou Peng; Ken K. Chin

doi:10.1109/PVSC.2017.8366302

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

Alan E. Delahoy, Sebastian Falk, Payai Patra, Roman Korotkov, Bastian Siepchen, Shou Peng, Ken K. Chin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), Zn_xSn_yO, Cd_xSn_yO, and Cu_2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm²/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu_2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

Original language	English (US)
Title of host publication	2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1452-1454
Number of pages	3
ISBN (Electronic)	9781509056057
DOIs	https://doi.org/10.1109/PVSC.2017.8366302
State	Published - 2017
Event	44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States Duration: Jun 25 2017 → Jun 30 2017

Publication series

Name	2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017

Other

Other	44th IEEE Photovoltaic Specialist Conference, PVSC 2017
Country/Territory	United States
City	Washington
Period	6/25/17 → 6/30/17

All Science Journal Classification (ASJC) codes

Renewable Energy, Sustainability and the Environment
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/PVSC.2017.8366302

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Delahoy, A. E., Falk, S., Patra, P., Korotkov, R., Siepchen, B., Peng, S., & Chin, K. K. (2017). Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017 (pp. 1452-1454). (2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2017.8366302

Delahoy, Alan E. ; Falk, Sebastian ; Patra, Payai et al. / Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1452-1454 (2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017).

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title = "Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO",

abstract = "An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.",

author = "Delahoy, {Alan E.} and Sebastian Falk and Payai Patra and Roman Korotkov and Bastian Siepchen and Shou Peng and Chin, {Ken K.}",

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year = "2017",

doi = "10.1109/PVSC.2017.8366302",

language = "English (US)",

series = "2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Delahoy, AE, Falk, S, Patra, P, Korotkov, R, Siepchen, B, Peng, S & Chin, KK 2017, Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. in 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017, Institute of Electrical and Electronics Engineers Inc., pp. 1452-1454, 44th IEEE Photovoltaic Specialist Conference, PVSC 2017, Washington, United States, 6/25/17. https://doi.org/10.1109/PVSC.2017.8366302

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. / Delahoy, Alan E.; Falk, Sebastian; Patra, Payai et al.
2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1452-1454 (2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Delahoy, Alan E.

AU - Falk, Sebastian

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AU - Korotkov, Roman

AU - Siepchen, Bastian

AU - Peng, Shou

AU - Chin, Ken K.

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N2 - An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

AB - An R&D-scale hollow cathode sputtering (HCS) system has been designed and built at NJIT. It operates in reactive mode using metal targets and can deposit virtually any metal oxide. We survey the use of metal oxide layers in thin film PV and report the preparation by HCS of several oxides including ZnO, ZnO:Al (AZO), ZnxSnyO, CdxSnyO, and Cu2-xO. Oxynitrides have also been prepared. For AZO, an excellent electron mobility of 53.4 cm2/Vs has so far been achieved, close to a world record for an as-deposited, sputter-based AZO layer. Cu2-xO layers have been successfully utilized as a back contact in CdTe solar cells. Work is under way to prepare the entire front stack of CdTe solar cells, namely TCO/HRT/buffer, by hollow cathode sputtering.

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ER -

Delahoy AE, Falk S, Patra P, Korotkov R, Siepchen B, Peng S et al. Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1452-1454. (2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017). doi: 10.1109/PVSC.2017.8366302

Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

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