Metal oxides produced by hollow cathode sputtering, their utility in thin film photovoltaics, and results for AZO

  • Alan E. Delahoy
  • , Sebastian Falk
  • , Payai Patra
  • , Roman Korotkov
  • , Bastian Siepchen
  • , Shou Peng
  • , Ken K. Chin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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