Metrology of scattering with angular limitation projection electron lithography masks

  • J. A. Liddle
  • , M. I. Blakey
  • , T. Saunders
  • , R. C. Farrow
  • , L. A. Fetter
  • , C. S. Knurek
  • , R. Kasica
  • , A. E. Novembre
  • , M. L. Peabody
  • , D. M. Tennant
  • , D. L. Windt
  • , M. Postek

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Keyphrases

Engineering

Medicine and Dentistry