Micro-Mirror & Actuator with Extended Travel Range - 6,480,646

Kenneth (Beau) Farmer (Inventor), Richard Brown (Inventor), Xing Wu (Inventor)

Research output: InnovationPatent

Abstract

https://www.google.com/patents/US6480646

Original languageEnglish (US)
StatePublished - Jul 2018
Externally publishedYes

Keywords

  • Patent Issued

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