Micro-Mirror & Actuator with Extended Travel Range - 6,480,646

Kenneth (Beau) Farmer (Inventor)
, Richard Brown (Inventor)
, Xing Wu (Inventor)

Research output: Innovation › Patent

Abstract

https://www.google.com/patents/US6480646

Original language	English (US)
State	Published - Jul 2018
Externally published	Yes

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