Microbeam high angular resolution diffraction applied to optoelectronic devices

A. Kazimirov, A. A. Sirenko, D. H. Bilderback, Z. H. Cai, B. Lai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Collimating perfect crystal optics in a combination with the X-ray focusing optics has been applied to perform high angular resolution microbeam diffraction and scattering experiments on micron-size optoelectronic devices produced by modern semiconductor technology. At CHESS, we used capillary optics and perfect Si/Ge crystal(s) arrangement to perform X-ray standing waves, high angular-resolution diffraction and high resolution reciprocal space mapping analysis. At the APS, 2ID-D microscope beamline, we employed a phase zone plate producing a beam with the size of 240 nm in the horizontal plane and 350 nm in the vertical (diffraction) plane and a perfect Si (004) analyzer crystal to perform diffraction analysis of selectively grown InGaAsP and InGaAlAs-based waveguides with arc sec angular resolution.

Original languageEnglish (US)
Title of host publicationSYNCHROTRON RADIATION INSTRUMENTATION
Subtitle of host publicationNinth International Conference on Synchrotron Radiation Instrumentation
Pages1395-1398
Number of pages4
DOIs
StatePublished - 2007
EventSYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation - Daegu, Korea, Republic of
Duration: May 28 2006Jun 28 2006

Publication series

NameAIP Conference Proceedings
Volume879
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherSYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation
CountryKorea, Republic of
CityDaegu
Period5/28/066/28/06

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Keywords

  • Angular resolution
  • Microbeam
  • Optoelectronics

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