@inproceedings{66c6c6e8b2934ff08c2358a177936f14,
title = "Microbeam high angular resolution diffraction applied to optoelectronic devices",
abstract = "Collimating perfect crystal optics in a combination with the X-ray focusing optics has been applied to perform high angular resolution microbeam diffraction and scattering experiments on micron-size optoelectronic devices produced by modern semiconductor technology. At CHESS, we used capillary optics and perfect Si/Ge crystal(s) arrangement to perform X-ray standing waves, high angular-resolution diffraction and high resolution reciprocal space mapping analysis. At the APS, 2ID-D microscope beamline, we employed a phase zone plate producing a beam with the size of 240 nm in the horizontal plane and 350 nm in the vertical (diffraction) plane and a perfect Si (004) analyzer crystal to perform diffraction analysis of selectively grown InGaAsP and InGaAlAs-based waveguides with arc sec angular resolution.",
keywords = "Angular resolution, Microbeam, Optoelectronics",
author = "A. Kazimirov and Sirenko, {A. A.} and Bilderback, {D. H.} and Cai, {Z. H.} and B. Lai",
note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; SYNCHROTRON RADIATION INSTRUMENTATION: 9th International Conference on Synchrotron Radiation Instrumentation ; Conference date: 28-05-2006 Through 28-06-2006",
year = "2007",
doi = "10.1063/1.2436325",
language = "English (US)",
isbn = "0735403732",
series = "AIP Conference Proceedings",
pages = "1395--1398",
booktitle = "SYNCHROTRON RADIATION INSTRUMENTATION",
}