@inproceedings{b25794c5062f468daa6dcc9eb6a2c8bc,
title = "Microbeam X-Ray Standing Wave and High Resolution Diffraction",
abstract = "Post-focusing collimating optics are introduced as a tool to condition X-ray microbeams for the use in high-resolution X-ray diffraction and scattering techniques. As an example, a one-bounce imaging capillary and miniature Si(004) channel-cut crystal were used to produce a microbeam with 10 μm size and an ultimate angular resolution of 2.5 arc sec. This beam was used to measure the strain in semiconductor microstructures by using X-ray high resolution diffraction and standing wave techniques to Δd/d < 5×10-4.",
author = "A. Kazimirov and Bilderback, {D. H.} and R. Huang and A. Sirenko",
note = "Publisher Copyright: {\textcopyright} 2004 American Institute of Physics.; 8th International Conference on Synchrotron Radiation Instrumentation ; Conference date: 25-08-2003 Through 29-08-2003",
year = "2004",
month = may,
day = "12",
doi = "10.1063/1.1757972",
language = "English (US)",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
pages = "1027--1030",
booktitle = "Synchrotron Radiation Instrumentation",
}