Microbeam X-Ray Standing Wave and High Resolution Diffraction

A. Kazimirov, D. H. Bilderback, R. Huang, A. Sirenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Post-focusing collimating optics are introduced as a tool to condition X-ray microbeams for the use in high-resolution X-ray diffraction and scattering techniques. As an example, a one-bounce imaging capillary and miniature Si(004) channel-cut crystal were used to produce a microbeam with 10 μm size and an ultimate angular resolution of 2.5 arc sec. This beam was used to measure the strain in semiconductor microstructures by using X-ray high resolution diffraction and standing wave techniques to Δd/d < 5×10-4.

Original languageEnglish (US)
Title of host publicationSynchrotron Radiation Instrumentation
Subtitle of host publication8th International Conference on Synchrotron Radiation Instrumentation
PublisherAmerican Institute of Physics Inc.
Pages1027-1030
Number of pages4
ISBN (Electronic)0735401799
DOIs
StatePublished - May 12 2004
Event8th International Conference on Synchrotron Radiation Instrumentation - San Francisco, United States
Duration: Aug 25 2003Aug 29 2003

Publication series

NameAIP Conference Proceedings
Volume705
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other8th International Conference on Synchrotron Radiation Instrumentation
CountryUnited States
CitySan Francisco
Period8/25/038/29/03

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Microbeam X-Ray Standing Wave and High Resolution Diffraction'. Together they form a unique fingerprint.

Cite this