Microengineered sensors: A review

Durga Misra; W. N. Carr

doi:10.1109/ELECTR.1991.718181

Microengineered sensors: A review

Durga Misra, W. N. Carr

Electrical and Computer Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Recently the application of bulk and surface processing of silicon related materials has made it possible to successfully fabricate micromechanical structures in the range of 0.5 to 500 microns, which exhibits unrestrained motion over at least one degree of freedom. The sculptural fabrication techniques can be used to realize a variety of measurement devices (microengineered sensors). This paper describes the recent developments in the area of design, fabrication and operation of these microengineered sensors. The possible integration of the sensing elements with the signalprocessing circuit on one chip (the so called smart sensors) is also being discussed briefly.

Original language	English (US)
Pages	92-97
Number of pages	6
DOIs	https://doi.org/10.1109/ELECTR.1991.718181
State	Published - Jan 1 1991
Event	1991 Electro International Conference, ELECTR 1991 - New York, United States Duration: Apr 16 1991 → Apr 18 1991

Conference

Conference	1991 Electro International Conference, ELECTR 1991
Country/Territory	United States
City	New York
Period	4/16/91 → 4/18/91

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Computer Networks and Communications
Instrumentation
Atomic and Molecular Physics, and Optics

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10.1109/ELECTR.1991.718181

Cite this

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doi = "10.1109/ELECTR.1991.718181",

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AB - Recently the application of bulk and surface processing of silicon related materials has made it possible to successfully fabricate micromechanical structures in the range of 0.5 to 500 microns, which exhibits unrestrained motion over at least one degree of freedom. The sculptural fabrication techniques can be used to realize a variety of measurement devices (microengineered sensors). This paper describes the recent developments in the area of design, fabrication and operation of these microengineered sensors. The possible integration of the sensing elements with the signalprocessing circuit on one chip (the so called smart sensors) is also being discussed briefly.

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Microengineered sensors: A review

Abstract

Conference

All Science Journal Classification (ASJC) codes

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