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Microengineered sensors: A review
Durga Misra
, W. N. Carr
Electrical and Computer Engineering
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Keyphrases
Signal Processing
100%
Sensing Element
100%
Fabrication Methods
100%
Measurement Device
100%
Single Degree of Freedom
100%
Smart Sensors
100%
Surface Processing
100%
Micromechanical Structures
100%
Bulk Processing
100%
Engineering
Degree of Freedom
100%
Sensing Element
100%
Fabrication Technique
100%
Smart Sensors
100%
Surface Processing
100%
Material Science
Electronic Circuit
100%
Silicon
100%