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Microengineered sensors: A review
Durga Misra
, W. N. Carr
Electrical and Computer Engineering
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peer-review
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Engineering & Materials Science
Fabrication
100%
Smart sensors
84%
Sensors
69%
Silicon
53%
Networks (circuits)
37%
Physics & Astronomy
sensors
82%
fabrication
54%
degrees of freedom
36%
chips
35%
silicon
24%