Microfabricated implantable flow sensor for medical applications

Liu Sheng, Reginald Farrow, James L. Zunino, Hee C. Lim, John Federici, Gordon Thomas

Research output: Chapter in Book/Report/Conference proceedingConference contribution


ARF wireless capacitive flow sensor is developed. The sensor has integrated inductor with the flow sensitive capacitors as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied flow. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139 MPa. The sensor has size of 10 mm × 4 mm × 0.5 um. The sensor integrated two pressure sensors together and designed related to flow 5-20ml/hour. The deflection of different shape of membranes and the parameters of flow sensor sensitivity are discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

Original languageEnglish (US)
Title of host publicationMicrofluidics, BioMEMS, and Medical Microsystems VI
StatePublished - 2008
EventMicrofluidics, BioMEMS, and Medical Microsystems VI - San Jose, CA, United States
Duration: Jan 21 2008Jan 22 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMicrofluidics, BioMEMS, and Medical Microsystems VI
Country/TerritoryUnited States
CitySan Jose, CA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Flow sensor
  • MEMS
  • Pressure sensor
  • Resonant frequency


Dive into the research topics of 'Microfabricated implantable flow sensor for medical applications'. Together they form a unique fingerprint.

Cite this