@inproceedings{62726707ff0b4f1f9b1abcc0361be6ae,
title = "Microfabricated implantable flow sensor for medical applications",
abstract = "ARF wireless capacitive flow sensor is developed. The sensor has integrated inductor with the flow sensitive capacitors as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied flow. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139 MPa. The sensor has size of 10 mm × 4 mm × 0.5 um. The sensor integrated two pressure sensors together and designed related to flow 5-20ml/hour. The deflection of different shape of membranes and the parameters of flow sensor sensitivity are discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.",
keywords = "Flow sensor, MEMS, Pressure sensor, Resonant frequency",
author = "Liu Sheng and Reginald Farrow and Zunino, {James L.} and Lim, {Hee C.} and John Federici and Gordon Thomas",
year = "2008",
doi = "10.1117/12.763795",
language = "English (US)",
isbn = "9780819470614",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Microfluidics, BioMEMS, and Medical Microsystems VI",
note = "Microfluidics, BioMEMS, and Medical Microsystems VI ; Conference date: 21-01-2008 Through 22-01-2008",
}