Microfabricated implantable pressure sensor for flow measurement

Sheng Liu, Reginald Farrow, James L. Zunino, Hee C. Lim, John Federici, Gordon Thomas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A RF wireless capacitive pressure sensor is developed. The sensor has integrated inductor with the pressure sensitive capacitor as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied pressure. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139MPa. The sensor has size of 10 mm × 4 mm ×0.5 um. The sensor presents a pressure sensitivity of 1.65 MHz/cmH2O in pressure range of 0-20 CmH2O. The deflection of different shape of membranes is discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.

Original languageEnglish (US)
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
DOIs
StatePublished - 2008
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - San Jose, CA, United States
Duration: Jan 21 2008Jan 22 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6884
ISSN (Print)0277-786X

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
CountryUnited States
CitySan Jose, CA
Period1/21/081/22/08

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Flowmeter
  • MEMS
  • Pressure sensor
  • Resonant frequency

Fingerprint Dive into the research topics of 'Microfabricated implantable pressure sensor for flow measurement'. Together they form a unique fingerprint.

Cite this