@inproceedings{06db8f335a044dd291e6475bcf049dd4,
title = "Microfabricated implantable pressure sensor for flow measurement",
abstract = "A RF wireless capacitive pressure sensor is developed. The sensor has integrated inductor with the pressure sensitive capacitor as LC circuit. The resonant frequency of the sensor changes as the capacitance changes with applied pressure. The sensor uses LPCVD silicon nitride as sensitive membrane and the residual stress of the membrane has been measure as 139MPa. The sensor has size of 10 mm × 4 mm ×0.5 um. The sensor presents a pressure sensitivity of 1.65 MHz/cmH2O in pressure range of 0-20 CmH2O. The deflection of different shape of membranes is discussed. The deflection of square membrane is 130% to circular membrane under same applied pressure.",
keywords = "Flowmeter, MEMS, Pressure sensor, Resonant frequency",
author = "Sheng Liu and Reginald Farrow and Zunino, {James L.} and Lim, {Hee C.} and John Federici and Gordon Thomas",
year = "2008",
doi = "10.1117/12.763740",
language = "English (US)",
isbn = "9780819470591",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII",
note = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII ; Conference date: 21-01-2008 Through 22-01-2008",
}