Microfabricated implantable pressure sensor for flow measurement

Keyphrases

• Deflection 100%
• Micro-fabricated 100%
• Flow Measurement 100%
• Pressure Sensitivity 100%
• Applied Pressure 100%
• Implantable Pressure Sensor 100%
• Wireless 50%
• Pressure Range 50%
• Resonant Frequency 50%
• Residual Stress 50%
• Capacitors 50%
• LC Circuit 50%
• LPCVD Silicon Nitride 50%
• Capacitance Change 50%
• Square Membrane 50%
• Circular Membrane 50%
• Integrated Inductor 50%
• Sensitive Membrane 50%
• Capacitive Pressure Sensor 50%

Material Science

• Capacitance 100%
• Electronic Circuit 100%
• Low Pressure Chemical Vapor Deposition 100%
• Capacitor 100%
• Silicon Nitride 100%
• Residual Stress 100%
• Flow Measurement 100%

Engineering

• Pressure Sensor 100%
• Applied Pressure 100%
• Flow Measurement 100%
• Capacitive 50%
• Nitride 50%
• Resonant Frequency 50%
• Residual Stress 50%
• Pressure Range 50%