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Microfabricated implantable pressure sensor for flow measurement
Sheng Liu
, Reginald Farrow
, James L. Zunino
, Hee C. Lim
,
John Federici
, Gordon Thomas
Physics
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Keyphrases
Deflection
100%
Micro-fabricated
100%
Flow Measurement
100%
Pressure Sensitivity
100%
Applied Pressure
100%
Implantable Pressure Sensor
100%
Wireless
50%
Pressure Range
50%
Resonant Frequency
50%
Residual Stress
50%
Capacitors
50%
LC Circuit
50%
LPCVD Silicon Nitride
50%
Capacitance Change
50%
Square Membrane
50%
Circular Membrane
50%
Integrated Inductor
50%
Sensitive Membrane
50%
Capacitive Pressure Sensor
50%
Material Science
Capacitance
100%
Electronic Circuit
100%
Low Pressure Chemical Vapor Deposition
100%
Capacitor
100%
Silicon Nitride
100%
Residual Stress
100%
Flow Measurement
100%
Engineering
Pressure Sensor
100%
Applied Pressure
100%
Flow Measurement
100%
Capacitive
50%
Nitride
50%
Resonant Frequency
50%
Residual Stress
50%
Pressure Range
50%