Micromechanical characterization of chemically vapor deposited ceramic films

J. M. Grow, R. A. Levy

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Fingerprint

Dive into the research topics of 'Micromechanical characterization of chemically vapor deposited ceramic films'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds