A systematic way of designing the hardware and software interface of a microcomputer to an SEM is discussed. The objective is to make the SEM more versatile by being reconfigurable and help with data acquisition, storage, display, and manipulation.
|Original language||English (US)|
|Number of pages||10|
|Journal||Scanning Electron Microscopy|
|Issue number||pt 2|
|State||Published - Jan 1 1983|
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering