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Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets
Nai Qi Wu,
Mengchu Zhou
Electrical and Computer Engineering
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Contribution to journal
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Article
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peer-review
210
Scopus citations
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Dive into the research topics of 'Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets'. Together they form a unique fingerprint.
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Keyphrases
Modeling Analysis
100%
Time Variation
100%
Petri Nets
100%
Activity Time
100%
Modeling for Control
100%
Dual-arm
100%
Cluster Tools
100%
Residency Time Constraints
100%
Wafer
50%
Waiting Time
33%
Process Module
33%
Two-level
16%
Flow Pattern
16%
Operational Issues
16%
Minimum Cycle Time
16%
Petri Net Model
16%
Schedulability
16%
Periodic Schedules
16%
Sojourn Time
16%
Real-time Controller
16%
Operational Architecture
16%
Time Online
16%
Steady-state Operation
16%
Semiconductor Manufacturing Equipment
16%
Computer Science
Time Constraint
100%
Time Variation
100%
Petri Net
100%
Robot
50%
Wait Time
50%
In-Process
25%
Operational Architecture
25%
Engineering
Robot
100%
Semiconductor Manufacturing
50%
Flow Pattern
50%
Petri Net Model
50%
Sojourn Time
50%
State Operation
50%