Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

Meng Chu Zhou, Mu Der Jeng

Research output: Contribution to journalArticlepeer-review

285 Scopus citations


This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the complex semiconductor manufacturing processes and test procedures. A formal approach such as Petri nets enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them. This paper also serves as a tutorial paper. It briefly reviews applications of Petri nets in semiconductor manufacturing automation. It then introduces definitions and concepts of Petri nets. It proceeds with a discussion of basic Petri net modules in system modeling, a modeling method and a practical system's modeling example. Next, the paper presents their properties and their implications in manufacturing systems, as well as their analysis methods. Timed Petri nets are introduced for system simulation, performance evaluation, and scheduling purposes. An application-oriented case study is presented. Finally, the paper concludes with the active research areas in applying Petri nets to design of semiconductor manufacturing systems.

Original languageEnglish (US)
Pages (from-to)333-357
Number of pages25
JournalIEEE Transactions on Semiconductor Manufacturing
Issue number3
StatePublished - 1998

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


  • Automation
  • Discrete event systems
  • Performance evaluation
  • Petri nets
  • Qualitative analysis
  • Quantitative analysis
  • Reduction
  • Scheduling
  • Semiconductor manufacturing
  • System modeling and simulation


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