Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

Meng Chu Zhou, Mu Der Jeng

Research output: Contribution to journalArticlepeer-review

272 Scopus citations

Fingerprint

Dive into the research topics of 'Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds