Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

Physics & Astronomy

• Petri nets 100%
• scheduling 88%
• manufacturing 51%
• simulation 23%
• systems simulation 11%
• qualitative analysis 10%
• automation 10%
• quantitative analysis 8%
• modules 7%
• evaluation 5%
• performance 3%

Engineering & Materials Science

• Petri nets 60%
• Semiconductor materials 54%
• Scheduling 42%
• Computer simulation 33%
• Discrete event simulation 18%
• Automation 6%
• Chemical analysis 5%

Chemical Compounds

• Semiconductor 46%
• Simulation 39%
• Qualitative Analysis 16%
• Time 5%
• Application 4%