@inproceedings{bbf32c2ca4864e8fa9258af97e28a778,
title = "Modeling and design of an embossed diaphragm fabry-perot pressure Sensor",
abstract = "A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.",
keywords = "Embossed diaphragm, Fabry-Perot, Pressure sensor, Rigid-body diaphragm",
author = "Ivan Padron and Fiory, {Anthony T.} and Ravindra, {N. M.}",
year = "2008",
language = "English (US)",
isbn = "9781605606217",
series = "Materials Science and Technology Conference and Exhibition, MS and T'08",
pages = "992--997",
booktitle = "Materials Science and Technology Conference and Exhibition MS and T'08",
note = "Materials Science and Technology Conference and Exhibition, MS and T'08 ; Conference date: 05-10-2008 Through 09-10-2008",
}