Modeling and design of an embossed diaphragm fabry-perot pressure Sensor

Ivan Padron; Anthony T. Fiory; N. Ravindra

Modeling and design of an embossed diaphragm fabry-perot pressure Sensor

Ivan Padron, Anthony T. Fiory, N. Ravindra

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.

Original language	English (US)
Title of host publication	Materials Science and Technology Conference and Exhibition MS and T'08
Pages	992-997
Number of pages	6
Volume	2
State	Published - Dec 1 2008
Event	Materials Science and Technology Conference and Exhibition, MS and T'08 - Pittsburgh, PA, United States Duration: Oct 5 2008 → Oct 9 2008

Other

Other	Materials Science and Technology Conference and Exhibition, MS and T'08
Country	United States
City	Pittsburgh, PA
Period	10/5/08 → 10/9/08

All Science Journal Classification (ASJC) codes

Materials Science(all)
Mechanics of Materials

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@inproceedings{bbf32c2ca4864e8fa9258af97e28a778,

title = "Modeling and design of an embossed diaphragm fabry-perot pressure Sensor",

abstract = "A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.",

author = "Ivan Padron and Fiory, {Anthony T.} and N. Ravindra",

year = "2008",

month = dec,

day = "1",

language = "English (US)",

isbn = "9781605606217",

volume = "2",

pages = "992--997",

booktitle = "Materials Science and Technology Conference and Exhibition MS and T'08",

note = "Materials Science and Technology Conference and Exhibition, MS and T'08 ; Conference date: 05-10-2008 Through 09-10-2008",

}

TY - GEN

T1 - Modeling and design of an embossed diaphragm fabry-perot pressure Sensor

AU - Padron, Ivan

AU - Fiory, Anthony T.

AU - Ravindra, N.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.

AB - A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.

UR - http://www.scopus.com/inward/record.url?scp=63749089998&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=63749089998&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:63749089998

SN - 9781605606217

VL - 2

SP - 992

EP - 997

BT - Materials Science and Technology Conference and Exhibition MS and T'08

T2 - Materials Science and Technology Conference and Exhibition, MS and T'08

Y2 - 5 October 2008 through 9 October 2008

ER -