Abstract
A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.
| Original language | English (US) |
|---|---|
| Title of host publication | Materials Science and Technology Conference and Exhibition MS and T'08 |
| Pages | 992-997 |
| Number of pages | 6 |
| Volume | 2 |
| State | Published - Dec 1 2008 |
| Event | Materials Science and Technology Conference and Exhibition, MS and T'08 - Pittsburgh, PA, United States Duration: Oct 5 2008 → Oct 9 2008 |
Other
| Other | Materials Science and Technology Conference and Exhibition, MS and T'08 |
|---|---|
| Country/Territory | United States |
| City | Pittsburgh, PA |
| Period | 10/5/08 → 10/9/08 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials