Modeling and design of an embossed diaphragm fabry-perot pressure Sensor

Ivan Padron, Anthony T. Fiory, N. Ravindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A new embossed diaphragm based Fabry-Perot cavity is introduced in the fabrication of a pressure sensor. An analytical approach is deployed to study the embossed diaphragm and Fabryperot cavity behavior as well the sensor's performance. The advantages of the embossed diaphragm based Fabry-Perot cavity are observed in relation to the flat diaphragm based FabryPerot cavity.

Original languageEnglish (US)
Title of host publicationMaterials Science and Technology Conference and Exhibition MS and T'08
Pages992-997
Number of pages6
Volume2
StatePublished - Dec 1 2008
EventMaterials Science and Technology Conference and Exhibition, MS and T'08 - Pittsburgh, PA, United States
Duration: Oct 5 2008Oct 9 2008

Other

OtherMaterials Science and Technology Conference and Exhibition, MS and T'08
CountryUnited States
CityPittsburgh, PA
Period10/5/0810/9/08

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials

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