Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net

Naiqi Wu; Chengbin Chu; Feng Chu; Meng Chu Zhou

doi:10.1109/ICNSC.2008.4525188

Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net

Naiqi Wu, Chengbin Chu, Feng Chu, Meng Chu Zhou

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

With wafer residency time constraints for some wafer fabrication processes, the schedulability and scheduling problems of cluster tools are still open. Addressing these issues, this paper conducts their schedulability analysis. A Petri net (PN) model, called resource-oriented PN (ROPN), is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, an analytical scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable.

Original language	English (US)
Title of host publication	Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC
Pages	84-89
Number of pages	6
DOIs	https://doi.org/10.1109/ICNSC.2008.4525188
State	Published - 2008
Event	2008 IEEE International Conference on Networking, Sensing and Control, ICNSC - Sanya, China Duration: Apr 6 2008 → Apr 8 2008

Publication series

Name	Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC

Other

Other	2008 IEEE International Conference on Networking, Sensing and Control, ICNSC
Country/Territory	China
City	Sanya
Period	4/6/08 → 4/8/08

All Science Journal Classification (ASJC) codes

Computer Networks and Communications
Control and Systems Engineering

Access to Document

10.1109/ICNSC.2008.4525188

Cite this

Wu, N., Chu, C., Chu, F., & Zhou, M. C. (2008). Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net. In Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC (pp. 84-89). Article 4525188 (Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC). https://doi.org/10.1109/ICNSC.2008.4525188

Wu, Naiqi ; Chu, Chengbin ; Chu, Feng et al. / Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net. Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC. 2008. pp. 84-89 (Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC).

@inproceedings{a71ed9ab1fcc4690a344b502e72372cc,

title = "Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net",

abstract = "With wafer residency time constraints for some wafer fabrication processes, the schedulability and scheduling problems of cluster tools are still open. Addressing these issues, this paper conducts their schedulability analysis. A Petri net (PN) model, called resource-oriented PN (ROPN), is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, an analytical scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable.",

author = "Naiqi Wu and Chengbin Chu and Feng Chu and Zhou, {Meng Chu}",

year = "2008",

doi = "10.1109/ICNSC.2008.4525188",

language = "English (US)",

isbn = "9781424416851",

series = "Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC",

pages = "84--89",

booktitle = "Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC",

note = "2008 IEEE International Conference on Networking, Sensing and Control, ICNSC ; Conference date: 06-04-2008 Through 08-04-2008",

}

Wu, N, Chu, C, Chu, F & Zhou, MC 2008, Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net. in Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC., 4525188, Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC, pp. 84-89, 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC, Sanya, China, 4/6/08. https://doi.org/10.1109/ICNSC.2008.4525188

Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net. / Wu, Naiqi; Chu, Chengbin; Chu, Feng et al.
Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC. 2008. p. 84-89 4525188 (Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - With wafer residency time constraints for some wafer fabrication processes, the schedulability and scheduling problems of cluster tools are still open. Addressing these issues, this paper conducts their schedulability analysis. A Petri net (PN) model, called resource-oriented PN (ROPN), is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, an analytical scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable.

AB - With wafer residency time constraints for some wafer fabrication processes, the schedulability and scheduling problems of cluster tools are still open. Addressing these issues, this paper conducts their schedulability analysis. A Petri net (PN) model, called resource-oriented PN (ROPN), is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, an analytical scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable.

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Wu N, Chu C, Chu F, Zhou MC. Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net. In Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC. 2008. p. 84-89. 4525188. (Proceedings of 2008 IEEE International Conference on Networking, Sensing and Control, ICNSC). doi: 10.1109/ICNSC.2008.4525188

Modeling and schedulability analysis of single-arm cluster tools with wafer residency time constraints using Petri net

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