Abstract
This work investigates the challenging problem of scheduling single-arm multi-cluster tools with wafer residency time constraints. They have linear topology and their bottleneck tool is process-bound. This work aims to find an optimal one-wafer cyclic schedule. With a prior developed Petri net model and the minimal cycle time for a multi-cluster tool without wafer residency time constraints, it derives the necessary and sufficient schedulability conditions. Then, it gives an algorithm to find an optimal one-wafer cyclic schedule if schedulable. Such a schedule is found by simply setting the robots' waiting time for each tool. Thus, it is very efficient and can be used to solve practical problems. Examples are presented to illustrate the applications of the proposed methods.
| Original language | English (US) |
|---|---|
| Article number | 6899308 |
| Pages (from-to) | 81-86 |
| Number of pages | 6 |
| Journal | IEEE International Conference on Automation Science and Engineering |
| Volume | 2014-January |
| DOIs | |
| State | Published - 2014 |
| Event | 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014 - Taipei, Taiwan, Province of China Duration: Aug 18 2014 → Aug 22 2014 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering