Modeling emissivity of rough and textured silicon wafers

Bhushan L. Sopori; Wei Chen; S. Abedrabbo; N. M. Ravindra

doi:10.1007/s11664-998-0094-3

Modeling emissivity of rough and textured silicon wafers

Bhushan L. Sopori, Wei Chen, S. Abedrabbo, N. M. Ravindra

Physics

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A method for calculating the emissivity of Si wafers with planar and nonplanar (such as rough or textured) surface morphologies is described. The technique is similar to that used in modeling of light trapping in solar cells and is also applicable to those cases when the wafer may have thin dielectric or metal layers. A software package is developed that uses this method. This package includes an approach for calculating the refractive index and absorption coefficient as a function of wavelength, for various temperatures and dopant concentrations. We present results for a number of cases to demonstrate the applications of this model.

Original language	English (US)
Pages (from-to)	1341-1346
Number of pages	6
Journal	Journal of Electronic Materials
Volume	27
Issue number	12
DOIs	https://doi.org/10.1007/s11664-998-0094-3
State	Published - Dec 1998

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Absorption coefficient
Emissivity
Refractive index
Silicon wafers
Surface roughness

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10.1007/s11664-998-0094-3

Cite this

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title = "Modeling emissivity of rough and textured silicon wafers",

abstract = "A method for calculating the emissivity of Si wafers with planar and nonplanar (such as rough or textured) surface morphologies is described. The technique is similar to that used in modeling of light trapping in solar cells and is also applicable to those cases when the wafer may have thin dielectric or metal layers. A software package is developed that uses this method. This package includes an approach for calculating the refractive index and absorption coefficient as a function of wavelength, for various temperatures and dopant concentrations. We present results for a number of cases to demonstrate the applications of this model.",

keywords = "Absorption coefficient, Emissivity, Refractive index, Silicon wafers, Surface roughness",

author = "Sopori, {Bhushan L.} and Wei Chen and S. Abedrabbo and Ravindra, {N. M.}",

note = "Funding Information: This work was supported by the U.S. Department of Energy under Contract #DE-Ac36-83CH10093 and by The DOE Center of Excellence for Synthesis and Processing of Advanced Materials. The authors would like to thank Jamal Madjdpour for his help with developing the code for the calculations.",

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doi = "10.1007/s11664-998-0094-3",

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T1 - Modeling emissivity of rough and textured silicon wafers

AU - Sopori, Bhushan L.

AU - Chen, Wei

AU - Abedrabbo, S.

AU - Ravindra, N. M.

N1 - Funding Information: This work was supported by the U.S. Department of Energy under Contract #DE-Ac36-83CH10093 and by The DOE Center of Excellence for Synthesis and Processing of Advanced Materials. The authors would like to thank Jamal Madjdpour for his help with developing the code for the calculations.

PY - 1998/12

Y1 - 1998/12

N2 - A method for calculating the emissivity of Si wafers with planar and nonplanar (such as rough or textured) surface morphologies is described. The technique is similar to that used in modeling of light trapping in solar cells and is also applicable to those cases when the wafer may have thin dielectric or metal layers. A software package is developed that uses this method. This package includes an approach for calculating the refractive index and absorption coefficient as a function of wavelength, for various temperatures and dopant concentrations. We present results for a number of cases to demonstrate the applications of this model.

AB - A method for calculating the emissivity of Si wafers with planar and nonplanar (such as rough or textured) surface morphologies is described. The technique is similar to that used in modeling of light trapping in solar cells and is also applicable to those cases when the wafer may have thin dielectric or metal layers. A software package is developed that uses this method. This package includes an approach for calculating the refractive index and absorption coefficient as a function of wavelength, for various temperatures and dopant concentrations. We present results for a number of cases to demonstrate the applications of this model.

KW - Absorption coefficient

KW - Emissivity

KW - Refractive index

KW - Silicon wafers

KW - Surface roughness

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JF - Journal of Electronic Materials

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Modeling emissivity of rough and textured silicon wafers

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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