Modeling of boron and phosphorus implantation into (100) germanium

Y. S. Suh, M. S. Carroll, R. A. Levy, M. A. Sahiner, G. Bisognin, C. A. King

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Fingerprint

Dive into the research topics of 'Modeling of boron and phosphorus implantation into (100) germanium'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds