Skip to main navigation Skip to search Skip to main content

Modeling of boron implantation into Si with decaborane ions

  • Zinetulla Insepov
  • , Marek Sosnowski
  • , Isao Yamada

Research output: Contribution to journal › Article › peer-review

1   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Modeling of boron implantation into Si with decaborane ions'. Together they form a unique fingerprint.
Sort by

Keyphrases

Chemistry

Physics

Material Science