Abstract
The process of magnetic-field-assisted assembly for the integration of semiconductor devices is described. A simplified model that is relevant to both magnetically assisted statistical assembly and magnetic-field-assisted assembly is presented. This two-dimensional, periodic model, which is a development of earlier work by Fonstad and coworkers, is solved using Fourier series, and an expression is found for the magnetic force of attraction between a soft magnetic layer and an array of permanently magnetized strips. The results show an exponential decrease of force with distance and the dependence of the force on other parameters such as layer thickness and spacing.
Original language | English (US) |
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Pages (from-to) | 374-378 |
Number of pages | 5 |
Journal | Journal of Electronic Materials |
Volume | 37 |
Issue number | 4 |
DOIs | |
State | Published - Apr 2008 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Keywords
- Heterogeneous integration
- MEMS
- Magnetic field
- Microassembly
- Self-assembly