Modeling, simulation and control of single wafer process in cluster tool base on FT-IR IN-line sensor

Shaohua Liu, Peter Solomon, R. Carpio, B. Fowler, D. Simmons, J. Wang, R. Wise, G. Imper, N. B. Riley, M. Moslehi, N. M. Ravindra

Research output: Contribution to journal › Conference article › peer-review