Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface

Z. Insepov, M. Sosnowski, G. H. Takaoka, I. Yamada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

Beams of energetic clusters may provide a unique tool for surface modification. Experimental data on the effects of cluster bombardment are still scarce but Molecular Dynamics Simulation may help guide the research in most promising directions. We modeled Ar cluster impact on gold surface and compared the calculated sputtering yield with the available experimental data at 30 keV. The results confirm the uniqueness of cluster impacts characterized by deposition of very high energy density at the surface.

Original languageEnglish (US)
Title of host publicationMaterials Synthesis and Processing Using Ion Beams
EditorsAnthony F. Garito, Alex K-Y. Jen, Charles Y-C. Lee, Larry R. Dalton
PublisherPubl by Materials Research Society
Pages999-1004
Number of pages6
ISBN (Print)1558992154
StatePublished - 1994
Externally publishedYes
EventProceedings of the MRS 1993 Fall Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
Volume316
ISSN (Print)0272-9172

Other

OtherProceedings of the MRS 1993 Fall Meeting
CityBoston, MA, USA
Period11/29/9312/3/93

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Molecular dynamics simulation of the effects of energetic cluster ion impact on solid surface'. Together they form a unique fingerprint.

Cite this