Fingerprint
Dive into the research topics of 'Multilayered ALD HfAlOx and HfO2 for high-quality gate stacks'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Multilayered ALD HfAlOx and HfO2 for high-quality gate stacks
Md Nasir Uddin Bhuyian, Durgamadhab Misra
Research output: Contribution to journal › Article › peer-review
19
Scopus
citations