TY - JOUR
T1 - Multiparadigm modeling for hybrid dynamic systems using a Petri net framework
AU - Lee, Jin Shyan
AU - Zhou, Meng Chu
AU - Hsu, Pau Lo
N1 - Funding Information:
Manuscript received April 29, 2005; revised November 26, 2005 and June 19, 2006. This work was supported in part by the National Science Council, Taiwan, R.O.C., under Grant NSC 92-2917 I-009-005, by the Ministry of Education, Taiwan, R.O.C., under Grant Ex-91-E-FA06-4-4, by the Ministry of Economic Affairs, Communication and Optoelectronics Infrastructure Construction Project, and Chang Jiang Scholars Program, PRC Ministry of Education. This paper was recommended by Associate Editor H. Pham.
PY - 2008/3
Y1 - 2008/3
N2 - Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach.
AB - Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach.
KW - Automated manufacturing systems
KW - Hybrid dynamic systems (HDSs)
KW - Multiparadigm modeling (MPaM)
KW - Petri nets (PNs)
KW - Semiconductor manufacturing
UR - http://www.scopus.com/inward/record.url?scp=41149102377&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=41149102377&partnerID=8YFLogxK
U2 - 10.1109/TSMCA.2007.914747
DO - 10.1109/TSMCA.2007.914747
M3 - Article
AN - SCOPUS:41149102377
SN - 1083-4427
VL - 38
SP - 493
EP - 498
JO - IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans
JF - IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans
IS - 2
ER -