Multiparadigm modeling for hybrid dynamic systems using a Petri net framework

Jin Shyan Lee, Meng Chu Zhou, Pau Lo Hsu

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach.

Original languageEnglish (US)
Pages (from-to)493-498
Number of pages6
JournalIEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans
Issue number2
StatePublished - Mar 2008

All Science Journal Classification (ASJC) codes

  • Software
  • Information Systems
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications


  • Automated manufacturing systems
  • Hybrid dynamic systems (HDSs)
  • Multiparadigm modeling (MPaM)
  • Petri nets (PNs)
  • Semiconductor manufacturing


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