@inproceedings{66d4d9d0c3224ead814e379ca7fcf2e5,
title = "Nanocrystalline silicon superlattices for nanoelectronic devices",
abstract = "This paper provides a brief introduction to a novel nanostructured system consisting of ordered layers of Si nanocrystals separated by atomically flat and chemically abrupt layers of amorphous silicon dioxide with thickness of several nanometers. The unique structural, optical and electrical properties permitting unusual device application are discussed.",
author = "Leonid Tsybeskov",
year = "2002",
language = "English (US)",
isbn = "0970827563",
series = "2002 International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002",
pages = "304--307",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2002 International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002",
note = "2002 International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002 ; Conference date: 21-04-2002 Through 25-04-2002",
}