Keyphrases
Electrostatic Force
100%
Natural Frequency Shift
100%
Natural Frequency
100%
Torsional Actuator
100%
Actuator
50%
Analytical Model
50%
Deep Reactive Ion Etching
25%
Multicrystalline Silicon
25%
High Vacuum
25%
Ultra-thin Silicon Wafer
25%
Electrostatic Spring
25%
Spring Constant
25%
SU-8
25%
Applied Voltage
25%
Finite Element Analysis Software
25%
Thermo-compression Bonding
25%
Electrostatic Actuator
25%
Engineering
Electrostatics
100%
Frequency Shift
100%
Natural Frequency
100%
Analytical Model
28%
Finite Element Method
14%
Silicon Single Crystal
14%
Deep Reactive Ion Etching
14%
Silicon Wafer
14%
Q Factor
14%
Good Agreement
14%
Applied Voltage
14%
Thermal Compression Bonding
14%
Spring Constant
14%
Material Science
Actuator
100%
Finite Element Method
16%
Silicon
16%
Reactive Ion Etching
16%
Single Crystal
16%
Silicon Wafer
16%